Wet Bench Features
Wafer Process Systems Inc. manufactures manual, semi-automated and fully automated wet benches and performs in field modifications to existing equipment to accommodate process related changes. We also provide in-field safety review and upgrades for our customers existing equipment eliminating the facilitization cost associated with the removal of existing equipment and installation of new equipment. Please contact us for more information.
Chemical Blend and Delivery Systems
Wafer Process Systems Inc. manufactures a comprehensive line of chemical blend systems, chemical delivery systems and related equipment as well as custom build to design equipment for surface prep cleaning, oxide and metals etching, resist stripping and metal left off applications commonly found in the semiconductor, MEMS, photonics, solar cell, disc drive and flat panel display manufacturing industries. Please contact us for more information.
Wafer Process Systems Inc. manufactures the most advanced IPA Dryer in the industry using patented Liquid Diffusion Technology (LDT) which incorporates an Venturi Aerosol IPA delivery system producing micro droplets which are directly introduced into the drying chamber. There is no heating of N2 and bubbling it through an IPA reservoir which has inherited risk associated with heating IPA liquid and vapors. Candela test have proven the Liquid Diffusion Technology as being particle neutral or particle negative with the optional Megasonic feature. Please contact us for more information.