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Wafer Process Systems Inc. Systems Integration Welcome to WPS
Systems Integration a Leading Supplier of Wet Chemical Process
Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, and Flat Panel Display manufacturing industries
since 1983 |
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Us
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Model WPS-800-VLF-FM-SS, Factory Mutual Approved
Stainless Steel Solvent Wet Process System
The Wafer Process Systems Inc. Model WPS-800-VLF-FM-SS, Factory Mutual Approved Stainless Steel Solvent Wet Process System are designed to process Si and GaAs wafers in a class 10 environment. Systems are constructed out of FM approved Stainless Steel for resistance to all solvent processes and fire. Safety and ergonomics are main aspects in the system design. Systems are designed to be installed through the wall with the control panel flush to the wall. All systems come with an FM approved CO2 flame suppression system which interlocks with EPO circuit and interfaces with customers facility fire monitor system. All DI Water fluid components are accessible through removable rear access panels. All electrical components are accessible through front slide out control panels and removable rear access panels and incorporate interlock switches with EPO interface for safety. All chemical wetted components are Stainless Steel or PFA Teflon. Front View and Rear View of Through Wall Installation in Class 10 Clean Room at Customers Facility |
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Standard Safety and Service Features: |
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- Three year warranty on all system electrical components and DI water components and two year warranty on all chemical fluid components. - Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out tag out knife switch electrical power disconnect. - All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load power circuits and component level circuit fused circuit protection. - Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit. - N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with emergency power off circuit. - Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off circuit with audible and visual alarm. - UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit. - FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum. - Casters and leg levelers for transportation and installation. - Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool. - Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges. - Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff. - Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with emergency power off circuit. |
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Optional Features: |
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