Wafer Process Systems Inc.

Systems Integration

Welcome to WPS Systems Integration

a Leading Supplier of Wet Chemical Process Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, Disc Drive

and Flat Panel Display manufacturing industries since 1983

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Model WPS-ECD-Au-4C Series, Computerized Electro Chemical Deposition System

The Wafer Process Systems Inc. The WPS ECD-Au-4C Series, Electro Chemical Deposition Wet Process System is designed

to process Si, GaAs and Ceramic substrates for Au Electro Chemical Deposition process using both Cyanide and Sulfide based solutions. The System is designed for use with Wafer Process Systems Inc. proprietary cathode and anode assemblies for

processing single substrates in a horizontal orientation (Fountain Plating) for single side deposition or vertical orientation for

single side deposition. The Plating Rectifier Interface is a 15 inch colored touch screen display with Windows® based software

for local programming and monitoring of power supply settings. The interface can be remote or incorporated into the system

weldment. The System is constructed out of FM Approved 4910 Compliant flame retardant PVC-C, Kynar® (PVDF) or Halar® (ECTFE) for corrosion resistance to all process solutions. Safety and ergonomics are main aspects in the system design. All fluid components are accessible through removable front and rear access panels. All electrical components are accessible through

front control panels and rear access panels and incorporate interlock switches with EPO interface for safety. Standard features

include emergency power off circuit with remote mushroom switch, remote load center and contactor, Photohelicâ low exhaust indicator with audible / visual alarm and EPO interface to eliminate the ability to operate equipment in the event of no exhaust, N2 purged head case with purge pressure interlock and EPO interface, plenum liquid level monitor with audible / visual alarm and EPO interface with auto DI water shutoff, back wall and plenum exhaust, recessed deck with 360° lip exhaust to insure capture of fumes during transfer of wafers. All chemical wetted components are PVDF or PFA. All electrical components are UL, CSA or CE listed. All system electrical components are guaranteed for three years and All system DI Water components are guaranteed for three years and provide a 98% uptime.

Model WPS-ECD-Au Series, Electro Chemical Deposition System Cathode and Anode Assemblies

Wafer Process Systems Inc. PVDF cathode and anode assemblies are designed to accommodate 75 mm through 300 mm

substrates for processing in a vertical orientation. Features include a one piece PVDF open back side design cathode assembly

with integral handle and PFA Teflon coated stainless steel contact pins which rotate and latch the substrate into place with four

point contact to substrate. The 90° rotating contact pins have knurled knobs for rotating the contact pins for easy placement and

removal of substrate into the fixture. The cathode uses a PVDF dove tail assembly to interface with plating vessel cathode

support track. The Anode is supported by an adjustable position assembly which enables the anode to be moved closer or

farther away from the substrate to achieve the desired plating results.

Vertical Orientation Cathode Assembly Vertical Orientation Anode Assembly

Cathode Assembly Insertion Into Cell Cathode Assembly in Plating Position

Plating Samples of Blind Side Vias

Au Plated Via Sample A

Au Plated Via Sample B

Au Plated Via Sample C

Standard Safety and Service Features:

- Three year warranty on all system electrical components and DI water components and two year warranty on all

chemical fluid components.

- Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out

tag out knife switch electrical power disconnect.

- All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load

power circuits and component level circuit fused circuit protection.

- Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit.

- N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with

emergency power off circuit.

- Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off

circuit with audible and visual alarm.

- UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit.

- FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum.

- Casters and leg levelers for transportation and installation.

- Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool.

- Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges.

- Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff.

- Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with

emergency power off circuit.

Optional Features:

- Access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot

Identification (Alfa-Numeric), Chemical Data (Manufacturer, Lot Identification, Mixture Ratio, and Date of Dispense).

- Data logging of all PLC based controls.

- Microprocessor based Graphical User Interface with real time data acquisition and control.

- Automatic Bulk Chemical Dispense.

- Vertical HEPA or ULPA laminar flow air filtration.

- FM Approved 304 stainless steel constructed weldment with #4 finished and integral secondary containment

plenum.

- FM Approved 316 stainless steel constructed weldment with mirror polished finished and integral secondary

containment plenum.

- FM Approved CO2 Flame Suppression System with Dual Mode UV/IR flame detectors.

Wafer Process Systems Inc. * 3641 Charter Park Drive * San Jose, California 95136 * Ph. (408) 445-3010 * Fax (408) 445-3004

* Web Address www.waferprocess.com * Email @ info@waferprocess.com   *