Wafer Process Systems Inc. has two new Semi Automated Batch Immersion Etch Tools available for immediate delivery. Both tools are identical and are constructed of FM Approved 4910 Compliant PVC-C. Both tools are PLC Controlled with Colored Touch Screen User Interface and include a transfer systems with a PTFE Teflon End Effector to accommodate a single 200 MM or 300 MM wafer cassette. Both have a seamless PFA Teflon Chemical Process Vessel with Immersion Heater and PVDF Quick Dump Rinser.

 

This would be an excellent tool for Wafer Etching with Acid or Base chemistries. With minor modifications to the Quick Dump Rinser and the End Effector this system would be capable of processing dual 200 MM cassettes and a single 300 MM cassette.

 

Front View of Semi Automated Wet Etch Fume Hood with 300MM Wafer Cassette 

---

 

View of PFA Teflon Chemical Vessel with Teflon Immersion Heater.

 

---

 

Over View of Semi Automated Wet Bench with PLC Controls with Colored Touch Screen User Interface, Rotary Transfer System with PTFE Teflon End Effector to accommodate single 200 MM or Single 300 MM wafer Cassette, PFA Teflon Chemical Vessel with Teflon Immersion Heater and PVDF Quick Dump Rinser.

---

 

Deck View of Semi Automated Wet Bench

---

 

Front View of Semi Automated Wet Bench

---

 

Side View of Semi Automated Wet Bench

---

 

Rear Facilities View of Semi Automated Wet Bench

 

For more information and pricing please contact Douglas Caldwell