The WPS-SQFFH-SS Series, Stainless Steel Square Front Fume Hood Wet Process System
The WPS-SQFFH-SS Series, Stainless Steel Square Front Fume Hood Wet Process System is designed to process Si and GaAs wafers or perform process tool parts cleaning in a class 10 environment. Systems are constructed out of FM approved Stainless Steel for resistance to all solvent processes. Safety and ergonomics are main aspects in the system design. Systems are designed with FM approved CO2 flame suppression system which interlocks with EPO circuit and interfaces with customers facility fire monitor system. All D. I. water fluid components are accessible through removable front or rear access panels. All electrical components are accessible through “Slide Out Control Panels” and incorporate interlocks for safety. All chemical wetted components are Stainless Steel, PVDF, PFA or Quartz. All electrical components are UL, CSA or CE listed. All system electrical components are guaranteed for three years and All system D.I. water components are guaranteed for two years and provide a 98% uptime.
standard features
  • Emergency Power Off Circuit with remote mushroom switch and remote load center and contactor.
  • Photohelic? low exhaust indicator with audible and visual alarm and EPO interface to eliminate the ability to operate equipment in the event of no exhaust.
  • All UL,CSA or CE Listed electrical components.
  • Removable front access panels for servicing plumbing and electrical components.
  • Access panel interlock switches with EPO interface.
  • N2 purged headcase with purge pressure interlock and EPO interface.
  • Clear wire reinforced glass safety shields.
  • Integral exhaust damper with wax coated sprinkler head.
  • Backwall and Plenum exhaust with adjustable damper plates.
  • “Up Draft” or “Down Draft” exhaust transition for through floor or elevated floor installations.
  • Stainless steel recess deck with 360° lip exhaust and backwall exhaust to insure capture of fumes during transfer of wafers.
  • Plenum liquid level monitor with audible and visual alarm and EPO interface to eliminate chance of flooding in the event of a plugged drain.
  • Auto D.I. water shutoff to interface in the event of a “Plenum Liquid Level Alarm” or “EPO” condition.
  • Flow through PFA Teflon? D.I. water manifold to prevent “Dead Legs” within the process piping.
  • Isolated chemical process vessel drains with separate facility connection.
  • Corrosion resistant casters and leg levelers for ease of transportation and installation.

optional features
  • FM approved Halar safety shields.
  • Counter balance safety shields.
  • PLC based control system with touch screen user interface.
  • Microprocessor based graphical user interface with Real Time data acquisition and control.
  • Automated wafer cassette handling.
  • Automatic Bulk Chemical Dispense.
  • FM approved CO2 flame suppression system with FM approved Fire Sentry? UV/IR flame detection.
  • Vertical HEPA or ULPA laminar flow air filtration.