The WPS-FA Series, Semi-Automated Wet Process Systems
The WPS-FA Series, Semi-Automated Wet Process Systems is designed to process two 200mm wafer cassettes with 25 wafers per cassette or one300 mm wafer cassette with 26 wafers in a class 10 environment. System includes touch screen user interface with PLC controls to perform all positioning system functions, chemical process vessel control functions,bulk chemical fill and quick dump rinser functions. The controls incorporate access coded multi-recipe files with full graphical display of all process parameters, I/O status and any alarm conditions. Servo or pneumatic positioning systems in either rotary or linear configurations to accommodate payloads up to 75 pounds. All wetted components are PVDF, PFA or Quartz. Electrical components are UL, CSA or CE listed. All system electrical components are guaranteed for three years and All system D.I. water components are guaranteed for two years and provide a 98% uptime.
standard features
  • Automated wafer cassette handling.
  • PLC based control system with touch screen user interface.
  • Emergency Power Off Circuit with remote mushroom switch and remote load center and contactor.
  • Photohelic® low exhaust indicator with audible and visual alarm and EPO interface to eliminate the ability to operate equipment in the event of no exhaust.
  • All UL,CSA or CE Listed electrical components.
  • Removable front access panels for servicing plumbing and electrical components.
  • Clear PVC transfer arm enclosure with safety interlock switches to interface with PLC control system.
  • Access panel interlock switches with EPO interface.
  • N2 purged headcase with purge pressure interlock and EPO interface.
  • Integral exhaust damper with wax coated sprinkler head.
  • “Up Draft” or “Down Draft” exhaust transition for through floor or elevated floor installations.
  • Natural polypropylene recessed deck with 360° lip exhaust to insure capture of fumes during transfer of wafers.
  • Plenum liquid level monitor with audible and visual alarm and EPO interface to eliminate chance of flooding in the event of a plugged drain.
  • Auto D.I. water shutoff to interface in the event of a “Plenum Liquid Level Alarm” or “EPO” condition.
  • Flow through PFA Teflon® D.I. water manifold to prevent “Dead Legs” within the process piping.
  • Isolated chemical process vessel drains with separate facility connection.
  • Corrosion resistant casters and leg levelers for ease of transportation and installation.
optional features
  • FM approved CP7-D ® Flame Retardant Polypropylene (FM JI 3D7Q7.AM) or FM approved PVDF construction.
  • Microprocessor based graphical user interface with Real Time data acquisition and control.
  • Automatic Bulk Chemical Dispense.
  • FM approved CO2 flame suppression system with FM approved Fire Sentry® UV/IR flame detection.
  • Vertical HEPA or ULPA laminar flow air filtration.