The WPS-FA-P Series, Polypropylene Front Access Wet Process System is designed to process Si and GaAs wafers in a class 10 environment. Systems are constructed out of Stress Relieved Polypropylene or optional FM Approved 4910 Compliant Flame Retardant Polypropylene, Kynar® (PVDF) or Halar® (ECTFE) for corrosion resistance to all acids and bases. Modular recess deck with 360° lip exhaust and secondary exhaust ensures proper fume capture and reduces facility exhaust requirements. The through wall installation permits all service connections to be made in rear chase and facilitates auxiliary equipment installations. Open base provides for clean room air return and reduces particle build up beneath system. Seismic bracing at six points insures additional safety to facility and personnel. All DI Water fluid components are accessible through removable front access panels. All electrical components are accessible through slide out control panels and hinged top plate and incorporates interlocks for safety. All chemical wetted components are PVDF, PFA or Quartz. All electrical components are UL, CSA or CE listed. All system electrical components are guaranteed for three years and All system DI Water components are guaranteed for two years and provide a 98% uptime.

• Emergency Power Off Circuit with remote mushroom switch and remote load center and contactor.
• Photohelic® low exhaust indicator with audible and visual alarm and EPO interface to eliminate the ability to operate equipment in the event of no exhaust.
• All UL,CSA or CE Listed electrical components.
• Removable front access panels for servicing plumbing and electrical components.
• Access panel interlock switches with EPO interface.
• N2 purged headcase with purge pressure interlock and EPO interface.
• Integral exhaust damper with wax coated sprinkler head.
• “Up Draft” or “Down Draft” exhaust transition for through floor or elevated floor installations.
• Natural polypropylene recessed deck with 360° lip exhaust to insure capture of fumes during transfer of wafers.
• Plenum liquid level monitor with audible and visual alarm and EPO interface to eliminate chance of flooding in the event of a plugged drain.
• Auto DI water shutoff to interface in the event of a “Plenum Liquid Level Alarm” or “EPO” condition.
• Flow through PFA Teflon® DI water manifold to prevent “Dead Legs” within the process piping.
• Isolated chemical process vessel drains with separate facility connection.
• Corrosion resistant casters and leg levelers for ease of transportation and installation.

• FM approved 4910 Compliant Flame Retardant Polypropylene, FM approved Kynar® (PVDF) or FM approved Halar® (ECTFE) construction.
• PLC based control system with touch screen user interface.
• Microprocessor based graphical user interface with Real Time data acquisition and control.
• Automated wafer cassette handling.
• Automatic Bulk Chemical Dispense.
• FM approved CO2 flame suppression system with UV/IR flame detection.
• Vertical HEPA or ULPA laminar flow air filtration.