The Wafer Process Systems Model WPS-700-RA-A-150-200-1, is a Rear Access Automated Batch Chemical Process System with 150MM and 200MM process capability which incorporates independent PLC controllers for each process module. All modules operated independently of each other and are provided with a UPS for additional product safety in the event of power outages. Operator interface is via a Colored Touch Screen located on front control panel. The PLC based controllers permit both manual and automated operation of the Servo Positioning System. A three level coded access provides low level access for Fab Process Operator for wafer processing only using pre-programmed recipes; a medium level access for Fab Process Engineering personnel to edit existing process recipes and program new recipes and high level access for Equipment Engineering personnel or Fab Supervisors, which provides full access to all functions of the control system.

Other features include separate maintenance screens for manual operation of all functions to perform diagnostic checks, maintenance screen for autotune feature for PLC based PID temperature controller, maintenance screen for calibration of thermocouple offset into PLC controller and maintenance screen for manual/automatic operation of positioning system including jog, home search and vessel to vessel operation. Positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements. The integral database provides the ability to create multiple recipes and download from process recipe select screen. The access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot Identification (Alfa-Numeric), Chemical Data (Manufacturer, Lot Identification, Mixture Ratio, and Date of Dispense).

• Emergency power off circuit with remote mushroom switch on front and rear of cabinet.
• All UL listed electrical components, load center and contactor.
• Isolated electrical control compartments.
• Ground Fault Interrupt protected heater power circuits.
• Low exhaust indicator with audible and visual alarm indicator and EPO interface.
• Plenum liquid level monitor with audible and visual alarm indicator and EPO interface.
• Auto D.I. water shutoff in the event of a “Plenum Liquid Level Alarm” or “EPO” condition.
• Redundant high limit controls on all heated process vessels.
• Liquid level interlocks on all chemical process vessels.

• FM Approved CP7-D flame retardant polypropylene (FM JI 3D7Q7.AM)
• FM Approved PVDF (PolyvinylideneFlouride).
• FM Approved Halar / ECTFE (Ethylene chlorotrifluoroethylene).
• Stainless Steel for solvent processes.