 The WPS-QA Series, Quartz High Temperature Acid Process Vessels are fabricated out of a single piece fused Quartz vessel (99.99 % Pure). Process vessels can accommodate two each 200MM cassettes or one each 300MM wafer cassette. Vessels are designed with UL listed silicone bonded four side and bottom multi-zone heaters for even thermal dynamics. All vessels have BI-metal thermal snap disc protection to eliminate over heating of heaters and a“Type J” over temperature thermocouples to interface with “High Limit” controllers for redundant safety interlocks. Process vessels come with optional drain port (3/4” Flaretek). Recirculation process vessels feature scalloped edge overflow weir and sump with 3/4” Flaretek return ports for recirculation and filtration and 3/4” Flaretek inlet port with Quartz diffuser / cassette locator plate. Outer enclosure is made of flame retardant polypropylene and is insulated with ceramic fiber insulation. The flange seal is Flourosilicone for superior chemical resistance.
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