WET PROCESS STATION REQUIREMENTS
Date:
Customer:
Name:
Company:
Address:
Address:
Phone:
Fax:
E Mail::
Station Description/Process Description:
Cabinet Description:
FA-Series(Front Access)
RA-Series(Rear Access)
Through Wall
Wall Hung
SQFFH(Square Front Fume Hood)
VLFFH(Vertical Laminar Flow Hood)
Wafer Size:
2"(50mm)
4"(100mm)
5"(125mm)
6"(150mm)
8"(200mm)
12"(300mm)
Carriers in each tank:
1
2
Disk Size:
3.5"
5.25"
8"
Flat Panels:
Size:
Qty:
Process to flow from:
Left to Right
Right to Left
Front to Back
Back to Front
Material of Construction:
Polypropylene
Flame Retardant Polypropylene
Flame Retardant Polypropylene(4910 Compliant)
Polyvinylidenefluoride(PVDF)
Ethylenechlorotrifluoroethylene(ECTFE)
Stainless Steel
Safety Shield
Yes
No(Yes is standard for SEMI S2)
Fixed Counter Balance
Manual
Automated
Flat Deck with Lip Exhaust
Yes
No
Recess Deck with Lip Exhaust
Yes
No
Back Wall Exhaust with Damper Plates
Yes
No
Control Panel Color of Kydex:
Note: All Solvent(Stainless Steel) Systems Incorporate Flame Retardant Polypropylene(4910 Compliant) Material for Control Panels.
Comments:
