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an Industry leader in Wet Chemical Process Equipment
______________________________________________________________________________________________________________ Wafer Process Systems Inc. Liquid Diffusion Technology IPA Aerosol Dryer
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Welcome to WPS Systems Integration a Leading Supplier of Wet Chemical Process Equipment (Wet Bench) to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, BioMed, Disc Drive and Flat Panel Display manufacturing industries since 1983
Wafer Process Systems Inc. 300MM / 450MM Automated Wet Process System
Wafer Process Systems Inc. Liquid Diffusion Technology IPA Dryer
Don’t be fooled by the imitations. Other manufacturers can provide you an IPA Dryer using the Surface Tension Gradient process which uses heated N2 as the media to transfer the IPA to the drying chamber. Heating the IPA poses additional process and safety issues which our IPA Aerosol Dryer does not.
Wafer Process Systems Inc. LDT Dryer uses a patented Venturi process which creates an aerosol of IPA with specific droplet sizes which is introduce directly into the dryer chamber without heating the N2. The use of an aerosol eliminates the safety hazards associated with IPA Vapor Dryers. LDT Drying Technology is Cleaner and Safer than STG Drying Technology. Wafer Process Systems Inc. can do what the competitors have shown you they can't.
Wafer Process Systems Inc. manufactures a complete line of Manual, Semi Automated, and Fully Automated Dry In / Dry Out Wet Chemcial Process Equipment to perform a wide range of process applications such as Pre Deposition Surface Pre Cleans for Oxides and Metals (SC1 and SC2), Oxide Resist Strip (H2SO4/H202), Metal Resist Strip (Organic Solvent Chemistries), Metal Etch (Au, Cu, CR, Al), Nitride Strip, Buffered Oxide Etch, Electroless and Electro Chemical Deposition. All equipment designs are compatible with Class 10 Clean Rooms.
Wafer Process Systems Inc. customers include:
Applied Materials, Affymetrix, Agilent Technologies, Anritsu, AP Technology, Atmel, Aviza Technology, Checkpoint Systems, Digital Optics, Dow Corning, Integrated Device Technology, IPG Photonics, ITT Night Vision, JDS, Kobe Precision, Linear Technology, Loral Space Systems, Madison Research, National Semiconductor, nLight Photonics, Northrop Grumman, Philips Lumileds, Rohm Haas, Sandia National Labs, Seagate Technologies, Simon Frasier University, Ultratech Stepper, University of Texas-Balcones Research Center, Voltage Multipliers, Western Digital BangPa-In