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Contact Information

Wafer Process Systems Inc. is Leading Supplier of Wet Chemical Process Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, Disc Drive and Flat Panel Display manufacturing industries since 1983.

Corporate Office & All Other Territories



Wafer Process Systems, Inc.
3641 Charter Park Drive
San Jose, CA 95136


Name: Douglas Caldwell
Phone: (408) 445-3010
Fax: (408) 445-3004
Email: doug@waferprocess.com

Wafer Process Systems Inc. is conveniently located off of Old Hillsdale Avenue near Capitol Expressway and Snell Avenue intersection. We are located 10 miles (17 minute drive) south of San Jose International Airport off of Freeway 87 and Capitol Expressway.