Wafer Process Systems Inc. was established in 1983 by current CEO and President Douglas H. Caldwell out of necessity to satisfy the industry needs for in field service and wet process equipment support. The company originated mainly as a service and support organization for local Silicon Valley customers. As our customer’s needs for equipment service, modifications driven by process changes and new equipment requirements increased Mr. Caldwell realized the need to create a full time engineering team to support the manufacturing and he was soon joined by our current VP of Engineering Christopher J. Schmitz to facilitate this requirement.
Mr. Caldwell started the company after a four year tenure with Semifab Inc. where he was responsible for customer service and equipment support for North America. His responsibilities involved equipment installations, start ups, maintenance and in field modifications. At that time Semifab Inc. was one of the industries largest manufacturer of wet chemical process equipment and laminar flow hoods for the semiconductor and biomedical industries. Prior to working at Semifab Inc. Mr. Caldwell worked for Microair Inc. for a period of four years where his responsibilities ranged from manufacturing to final test and quality assurance. The exodus of Microair's engineering manager and sales manager, who left to start Semifab Inc. was the driving force which lead to Mr. Caldwell into joining Semifab Inc.
Mr. Schmitz joined Wafer Process Systems Inc. after the company was in operation for a period of six months. Prior to Mr. Schmitz joining Wafer Process Systems Inc. he worked for Semifab Inc. in their engineering department for a period of three years where he was responsible for design and generating documentation for manufacturing. Prior to his tenure with Semifab Inc. he had been employed by Santa Clara Plastics Inc., currently know as SCP Global, for a period of three years in the engineering department where his responsibilities where generating production drawings used in the manufacturing of Wet Chemical Process Equipment.
President/CEO - Douglas H. Caldwell
Vice President of Engineering - Christopher J. Schmitz
Customer Service Manager - Stuart H. Lebherz
Vice President of Administration/CFO - Barbara C. Caldwell
Wafer Process Systems Inc. manufactures a complete line of Manual, Semi Automated and Fully Automated Dry In / Dry Out Wet Chemical Process Equipment used in the manufacturing silicon and compound materials used in the manufacturing of microelectronic devices, computer disc drive media and slider assemblies, flat panel displays and photovoltaic products. Process applications include Surface Pre Cleans for Oxides and Metals Deposition (SC1 and SC2), Oxide Resist Strip (H2SO4/H202), Metal Resist Strip (Organic Solvent Chemistries), Metal Etch (Au, Cu, CR, Al), Nitride Strip, Buffered Oxide Etch, Electroless Chemical Deposition and Electro Chemical Deposition and Conveyorized Spray Etch systems. All Equipment designs are compatible for use in a Class 10 Clean Room Environment.
Wafer Process Systems Inc. manufactures a complete line of Wet Chemical Process Equipment used for parts cleaning in off line processes such as Quartz Tube and Quartz Cassette Cleaning (CVD Tube and Cassette Cleaning), Bell Jar Cleaning and Track Equipment Resist removal.
Wafer Process Systems Inc. manufactures raw material substrate cleaning equipment for Post Saw Adhesive Removal and Cleaning, Post Lapping and Post Polishing Clean, Aqueous Parts Cleaning for Optics and Machined Parts Cleaning.
Wafer Process Systems Inc. manufactures precision IPA Aerosol Drying System using the patented LDT process. The LDT Drying System can be provided as a stand alone, modular drop in or as part of an automated dry in/dry out wet process system.
Wafer Process Systems Inc. performs in field modifications to existing equipment installations to accommodate process changes and/or upgrades for our customers equipment without the need of expensive facility cost associated with removal and installation of new equipment.
Wafer Process Systems Inc. also stocks a complete inventory of spare parts including stand alone controllers and sensors which can be cross referenced to competitor’s parts for second sourcing replacements. If the Original Equipment Manufacturer you have purchase your equipment from is now out of business, Wafer Process Systems Inc. can provide the complete support you need to keep your equipment safely functioning for years to come.
Wafer Process Systems Inc. is committed to providing the highest quality products available in today’s marketplace. This is apparent by our industry first three year warranty for all products manufactured by us.
Wafer Process Systems Inc.uses only the highest quality electrical components, fluid components and control systems thus reducing equipment down time and providing the highest return on investment at the lowest cost of ownership as measured by SEMI RAM data.
Wafer Process Systems Inc.adheres to industry standards in all designs as defined by SEMI S2, NEC, NFPA and Factory Mutual 4910 guide lines to insure operator safety and equipment safety at the same time reducing facility risk.
Wafer Process Systems Inc. personnel are the most experience and professional in the industry and provide support to meet all of our customers needs.